Focus-position compensator

ABSTRACT

The present invention is directed towards a focus-position compensator for reducing focus variations on a microlens array. The focus-position compensator comprises a plurality of tiles that are affixed to a structure disposed between the lenslets of the microlens array and the target of the collimated light from the lenslets. Each tile refractive index and tile thickness is chosen to obtain a tile focus-position correction that will apply to a region of the microlens array.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of, and claims priority under 35 U.S.C.§120 from, U.S. patent application Ser. No. 10/325,648, filed Dec. 18,2002, now U.S. Pat. No. 6,791,759.

FIELD OF THE INVENTION

This invention relates to focus-position compensators for microlensarrays. More particularly, it relates to using tiles to affect thefocus-position compensation.

BACKGROUND OF THE INVENTION

Associated with the information revolution is a need to increase by manyorders of magnitude the rate of information transfer. This revolution isenabled by the switch from copper wire to optical fiber. Efficientimplementation of this change requires optical switches to move datafrom one fiber to another. For a large number of input and a largenumber of output fibers, this switch is typically referred to as anoptical crossbar switch.

A typical component of an optical crossbar switch is a fiber arraycoupled to a microlens array in such a way that an array ofsubstantially collimated and parallel beams leave the assembly. Aschematic of a microlens array is illustrated in FIG. 1. Each microlensarray 100 is comprised of a plurality of lenslets 110. In the typicalcase, each optical fiber is associated with a single lenslet 110.

A one-to-one mapping exists between fibers and optical beams leaving theassembly. The system performance is enhanced if each optical beam issubstantially focused on the end of its respective optical fiber. Theconstruction of such a system is simplified if all of the beams focusthrough the microlens array at substantially the same distance. In sucha case, the ends of all the optical fibers are arranged on a plane thatis a uniform distance from the microlens array. This requires that themicrolens array have a high degree of uniformity with respect to thedistance at which each lenslet focuses.

Manufacturing a microlens array with sufficiently high uniformity withrespect to the focus distance is expensive. Most often, the problem isassociated with variations in the focal length of the individuallenslets. However, for the purposes of this patent document, variationsin the focus or focus distance can be due to focal-length variations ofthe lenslets or any other source of nonuniformity. In more affordablemicrolens arrays the focus distance tends to vary slowly across thearray. A typical variation is illustrated in FIG. 2. For this particularmicrolens array, the low regions 120 indicate portions of the microlensarray for which the focus distance is as much as 3% less than thenominal value. The high regions 130 indicate portions of the microlensarray for which the focus distance is as much as 4% greater than thenominal value.

To reduce the cost of an optical crossbar switch and maintainsatisfactory performance, a means for compensating for the microlensfocus variations needs to be developed.

SUMMARY OF THE INVENTION

Embodiments of the invention include a variety of focus-positioncompensators for reducing the focus variations of a microlens array. Forthe purposes of this application, reducing the focus variations is to beinterpreted broadly. The reduction in variations can be associated withreduced maximum variations, reduced mean-square variations, reducedroot-mean square variations, or some other rational measure of focusvariations.

Focus-position compensators of the present invention include a pluralityof tiles. Each tile has its index of refraction and its thickness chosento obtain a specified tile focus-position adjustment or correction. Thetiles are disposed in relation to the microlens array such that theeffects of focus variations of the microlens array are reduced.

The invention also includes methods for making focus-positioncompensators for a microlens array. To practice the method, the spatialvariation of focus distances of the microlens array is determined. Toreduce the spatial variation of the focus distances to within a desiredlimit, tiles are placed in the light path between the microlens arrayand optical fibers. The number of tiles, the spatial distribution oftiles, and the tile focus-position corrections are chosen. For eachtile, the tile focus-position correction is a function of the tilethickness and the tile refractive index; hence these properties areselected for each tile.

A reference thickness is chosen that is greater than or equal to themaximum of all the tile thicknesses. Spacer-block thicknesses aredetermined for all the tiles. The spacer-block thickness is equal to thedifference between the reference thickness and the tile thickness. Thetiles are constructed, each having its specified thickness andrefractive index. All spacer blocks with non-zero spacer-block thicknessare constructed.

A tile tray having a receptacle for receiving each tile ismicromachined. The receptacles are positioned so that when populatedwith tiles, each tile will be properly situated relative to the othertiles.

The spacer blocks and tiles are placed in their receptacles. If thecorresponding spacer block exists (i.e., the spacer block has non-zerothickness) then the tile is placed on top of the spacer block. For tilesthat don't have a corresponding spacer block, the tile is simply placedinto its receptacle.

A curable bonding material is placed on top of each tile. An interveningstructure is placed on the curable bonding material. The interveningstructure can be the substrate of the microlens array, a fiber-blockwindow attached to optical fibers, or a window otherwise disposedbetween the optical fibers and the microlens array. The bonding materialis then cured, securing the tiles to the intervening structure. The tiletray and spacer blocks are then removed.

In lieu of the curable bonding material, adhesive free bonding or fusionbonding may be used to bond the tiles to the intervening structure.

Additional features and advantages of the invention will be set forth inpart in the description that follows, and in part will be obvious fromthe description, or may be learned by practice of the invention. Variousembodiments of the invention do not necessarily include all of thestated features or achieve all of the stated advantages.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings illustrate a complete embodiment of theinvention according to the best modes so far devised for the practicalapplication of the principles thereof, and in which:

FIG. 1 shows a microlens array.

FIG. 2 illustrates a typical focal length variation inducedfocus-distance variation across a microlens array.

FIGS. 3A-B show contour plots of the focus distance before and afterapplication of tiles. FIG. 3A shows the example situation prior to theapplication of tiles. FIG. 3B shows the same case after the applicationof tiles.

FIGS. 4A-C show different embodiments of the invention. In FIG. 4A, thetiles are affixed to the substrate of the microlens array. In FIG. 4B,the tiles are affixed to a window between the fiber array and themicrolens array. In FIG. 4C, the tiles are affixed to the fiber-blockwindow.

FIGS. 5A-D illustrate aspects of some steps in making a focus-positioncompensator according to the invention. FIG. 5A is an example microlensarray. FIG. 5B shows a tile tray. FIG. 5C shows different thicknesstiles in the receptacles of the tile tray. FIG. 5D shows the microlensarray with the focus-position compensator.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

Referring now to the drawings, where similar elements are numbered thesame, FIG. 1 depicts a microlens array 100 comprised of lenslets 110(only one of which is labeled). As shown in FIG. 2, the focus distanceof the microlens array is typically not uniform. However, in manyinstances the focus distance varies slowly across the microlens array,hence regionally compensating for focus variations can significantlyreduce the variation. The present invention employs the use of tiles toproduce regional focus-position compensations.

Preferred embodiments of a focus-position compensator include aplurality of tiles. Each tile has a tile refractive index n_(i) and atile thickness t_(i) where i is a unique designator for each tile. Thetile refractive index for each tile is substantially uniform over thetile. Similarly, the tile thickness for each tile is substantiallyuniform over the tile. The tile refractive index and the tile thicknessare chosen to obtain a tile focus-position correction Δ_(i). Because ofthe substantial uniformity of the tile refractive index and the tilethickness over the tile, the tile focus-position correction is itselfsubstantially uniform over the tile.

The tile focus-position correction is chosen to reduce the effects ofthe focus variation of the microlens array. Once the focus variation ofthe microlens array is known, appropriate focus distance increases canbe mapped to each region of the microlens array, with a tilecorresponding to each region. The tile is disposed in relation to themicrolens array such that the effects of focus variations of themicrolens array are reduced. The spatial relationship between the tilesand the microlens array should ensure that the tiles are in the lightpath between the lenslets and the target of the substantially collimatedlight.

In most instances, the microlens array is rectangular; hence tileshaving a rectangular planform are preferred. However, the broad scope ofthe invention is intended to include microlens arrays that are notrectangular and also tiles that do not have rectangular planforms, evenif the microlens array is rectangular.

A simple example is illustrated in FIGS. 3A-B. FIG. 3A shows contours ofthe focus distance of a microlens array. For simplicity, the focusdistance is shown as a continuous variable. In reality, each lenslet hasits own focus distance, so focus distance only has meaning at thediscrete lenslets. However, with a dense microlens array, where thefocus distance varies slowly from lenslet to lenslet, a continuousfunction is a good approximation to the actual situation. In thisexample, the focus distance varies according to the equation f=4.8mm+0.02(0.5 x+y), where x and y are measured in mm. This means that atposition x=0, y=0, the focus distance is 4.8 mm but as x and y increase,the focus distance increases linearly. In the middle of the microlensarray at x=10 mm and y=5 mm, the focus distance is 4.8 mm+0.2 mm=5.0 mm.At the upper right edge of the microlens array at x=20 mm and y=10 mm,the focus distance is 4.8 mm+0.4 mm=5.2 mm. Therefore the focus distancevaries 4% higher and lower than its central value of 5.0 mm.

Suppose that four tiles are chosen to correct the effects of themicrolens focus variation. For simplicity, each tile will be rectangularand will have nominal dimensions of 10 mm in the x direction and 5 mm inthe y direction. The tiles are evenly spaced on the microlens array asshown in FIG. 3B. As discussed later, in practice, gaps will probablyexist between each tile. Even if the tiles are assembled so that no gapexists, the focus-position correction can be discontinuous at the tileboundaries; hence the tile boundaries are preferably aligned withboundaries between lenslets. In this example, a focus-positioncorrection of 0.3 mm is used for the lower-left tile; 0.2 mm for the topleft and lower right tiles; and 0.1 mm for the tile at the top right.The focus position for light incident at the center of each tile is nowcorrected in such a way that the maximum focus variation is only 0.1 mm,or slightly less than 2%, similar to a microlens array with a focallength of 5.2±0.1 mm.

Alternatively, a focus-position correction of 0.2 mm could be used forthe lower-left tile; 0.1 mm for the top left and lower right tiles; andno correction for the tile at the top right. The focus position forlight incident at the center of each tile would now be similar to amicrolens array with a focal length of 5.1 mm and the maximum variationwould remain 0.1 mm. Whether the original or alternative correctionscheme is used will depend upon factors specific to each application ofthe invention. Both correction schemes are considered to be within thescope of the invention.

The focus-position corrections can be achieved by adjusting the tilethickness, the tile refractive index, or both. In most cases, thefocus-position correction is related to these parameters by theequation: Δ_(i)=t_(i)(1−n_(media)/n_(i)), where n_(media) is therefractive index of the media that the tile is supplanting. For mostcases of practical interest, the media is air, some inert atmosphere, ora vacuum. Generally, n_(media) can be approximated as 1 in those cases.Other appropriate relationships between the focus-position correction,the tile thickness, the tile refractive index, and the index ofrefraction of the external media, as well as other relevant parametersmay be used when required by the situation.

In the original scheme of the previous example, taking n_(media)=1, allof the tiles could have been made with thickness 0.6 mm. In this case,to achieve a 0.3 mm focus-position correction, the tile in the lowerleft would require a refractive index of 2. The tiles in the upper leftand lower right would require a refractive index of 1.5 to achieve a 0.2mm focus-position correction. To achieve a 0.1 mm focus-positioncorrection, the tile in the upper right would require a refractive indexof 1.2.

Alternatively, in the previous example with n_(media)=1, all of thetiles could have been made of a material having a refractive index of1.5. In this case, the tile in the lower left would need to be 0.9 mmthick, the upper left and lower right tiles would need to be 0.6 mmthick, and the upper right tile would be 0.3 mm thick. Clearly,combinations of different tile refractive indices and thicknesses can beused to achieve the desired focus corrections.

A large number of materials may be used to obtain the desired propertiesof the tiles. Clearly index of refraction is important, but uniformityof the material, cost, ease with which it can be machined and handled,scratch resistance, etc. are just some of the other material propertiesthat might influence which material is best suited for a specific tilingapplication. Some materials that are believed to be useful for tilesinclude: glass, sapphire, fused silica, calcite, quartz, CalciumFluoride, Magnesium Fluoride, Zinc Selenide, Zinc Sulfide, Germanium,Silicon, Gallium Arsenide, Gallium Phosphide, Aluminum Gallium Arsenide,Indium Gallium Arsenide, and KRS5 (an infrared window material thatcontains Tallium Bromide Thalium Iodide).

The tiles may be affixed to a variety of intervening structures toeffect the focus correction. The term intervening structure is usedbecause the structure is placed between the lenslets and the target forthe collimated light. FIGS. 4A-C show side views of three differentintervening structures.

In the embodiment illustrated in FIG. 4A, each lenslet 110 of themicrolens array 100 is supported in a substrate 150. The light from eachlenslet 110 is to be focused to a corresponding optical fiber 170, whichis supported in a fiber block fiber holder 210 and covered by a fiberblock window 180. The fiber block fiber holder 210 comprises one or moreelements that support the optical fibers 170. The fiber block fiberholder 210 includes any appropriate means for supporting the opticalfibers that is known to those skilled in the art. The plurality ofoptical fibers 170 attached to the fiber-block fiber holder 210 andcovered by the fiber block window 180 is known as the fiber array 160.In this embodiment, each tile 200 is affixed to the substrate 150 of themicrolens array 100. Although the tiles 200 are shown as having variablethickness, as discussed earlier, they may instead and/or also havevariable refractive indices to achieve the desired focus correction.Note that to avoid clutter in the figure, although many lenslets,optical fibers, and tiles are shown, only one of each is explicitlylabeled.

FIG. 4B illustrates an embodiment in which a window 190 serves as theintervening structure to which the tiles 200 are affixed. FIG. 4C showsan embodiment in which the tiles 200 are affixed to the fiber-blockwindow 180 of the fiber array 160. Other embodiments that fall withinthe broad scope of the claims are also considered as part of theinvention. For instance, some of the tiles can be affixed to thesubstrate 150 and others to the fiber-block window 180.

A variety of fastening techniques may be employed to affix the tiles tothe intervening structure. In some preferred embodiments a bondingmaterial is used. In the most preferred of these embodiments a curablebonding material is used. Most preferably, UV (ultraviolet) curingcement is used to affix the tiles to the intervening structure.Alternatively, adhesive free bonding (of which fusion bonding is aspecific example) may also be used to affix the tiles to the interveningstructure.

Because of the typically large difference in refractive index betweenthe tiles and the external media, an antireflection coating is oftenadded to the side of the tiles that is not affixed to the interveningstructure, i.e., the side exposed to the external media. Refractiveindex variations between the tiles and the intervening structure aretypically not so large, hence antireflection coatings are not usuallyemployed at that interface.

The construction of focus-position compensators corresponding to thepresent invention can be accomplished by separately bonding each tile inits proper position. However, the invention also includes more efficientmethods for making focus-position compensators for a microlens array.

To practice these methods, the spatial variation of the focus distancefor the microlens array needs to be determined. One way to determine thefocal length variation is with a Zygo Microlupi. A Zygo Microlupi is aninstrument that can measure the exact curvature of each lenslet in amicrolens array. From the curvature, the focal length of the individuallenslets is calculated using techniques known to those skilled in theart. Any additional alterations to the focus distance associated witheach lenslet can then be added to the computed focal length. Knowledgeof the focus distance of each lenslet is used to determine the spatialvariation of the microlens focus distances. Other approaches fordetermining the focus variation can also be used including, for example,a Hartmann sensor.

The number of tiles, the spatial distribution of tiles, and the tilefocus-position correction Δ_(i) of the i-th tile are chosen such thatthe focus variation of the microlens array is reduced to within adesired limit. The best choice for all of the parameters depends uponthe details of each case.

The tile thickness t_(i) and tile refractive index n_(i) are selected toachieve the desired tile focus correction Δ_(i). As discussed earlier, auseful formula that relates the focus correction, the thickness and therefractive index is Δ_(i)=t_(i)(1−n_(media)/n_(i)), where n_(media) isthe refractive index of the media that the tile supplants. Otherrelationships may be used as appropriate to determine the best choice ofparameters for any given situation.

After all the tile thicknesses are known, a reference thickness t_(ref)is chosen. The reference thickness should be greater than or equal tothe maximum tile thickness. The reference thickness is used to determinespacer-block thicknesses. The thickness of each spacer block isdesignated s_(i) and is determined by s_(i)=t_(ref)−t_(i).

The tile and spacer block thicknesses are constructed to have theirappropriate shapes and sizes. To reduce costs, in preferred embodiments,the tiles are cut from sheets of material that are obtained in thedesired thicknesses. The sheets may be of any appropriate tile material.Silica or glass is used in the most preferred embodiments although, asdiscussed earlier, many other materials are suitable. The spacer blockscan be similarly constructed. If any of the spacer blocks has zerothickness (i.e., s_(i)=0) then that spacer block is not necessary.

A tile tray having a receptacle for receiving each tile needs to bemicromachined. Each of the receptacles is positioned to receive itscorresponding tile. In preferred embodiments the tile tray isconstructed of Silicon and is micromachined with a deep reactive ionetching (DRIE) process. The use of the tile tray greatly facilitatestile alignment, especially when many tiles are used.

All spacer blocks having finite thickness (i.e., s_(i)>0) are placed intheir respective receptacles. Each tile is placed on top of itscorresponding spacer block where one exists (i.e., s_(i)>0). For tileswith no corresponding spacer block, the tiles are just placed in theirrespective receptacles. Note that because of the way in which the spacerblock thicknesses are determined, the sum of the tile thickness and thespacer-block thickness is always the same and equals t_(ref). This meansthat the top of all the tiles are at the same height.

The desired intervening structure is placed on top of the tiles, alignedand bonded. The order in which this is done depends, in part, upon thetype of intervening structure. As discussed earlier, in preferredembodiments the intervening structure is a substrate of the microlensarray, a fiber-block window, or a window placed between the microlensarray and a plurality of optical fibers.

In the case in which the intervening structure is the substrate of themicrolens array or a fiber-block window, the tile tray is aligned afterthe intervening structure is placed on top of the tiles but prior tobonding. In the case in which the intervening structure is the substrateof the microlens array, the tile tray is usually aligned with themicrolens array using X-Y positioners and a rotation stage to set thecorrect clocking angle. The alignment is most easily accomplished undera microscope. In preferred embodiments the alignment process tries toensure that the tile boundaries occur between the lenslets, so that thelight from a lenslet does not pass close enough to the tile boundary tobecome significantly distorted. A similar alignment is performed in thecase in which the intervening structure is the fiber-block window. Inthis case, the tile tray is aligned with the optical fibers, againtrying to ensure that a minimum amount of light is distorted by the tileboundaries. In preferred embodiments, the alignment is accurate to about0.01 mm.

Any appropriate bonding process known to those skilled in the art may beused. Some preferred embodiments employ adhesive free bonding,including, fusion bonding. Other preferred embodiments employ a curablebonding material, most preferably, UV curing cement.

In cases in which a curable bonding material is used, the curablebonding material is placed on top of each tile and then the desiredintervening structure is placed on top of the curable bonding material.In the case of UV curing cement, the curing involves exposure toultraviolet radiation.

After the tiles are bonded, the tile tray and the spacer blocks areremoved. The tiles are now affixed to the intervening structure. Incases in which the intervening structure is a window disposed betweenthe microlens array and the optical fibers, the window must be alignedwith the microlens array and the optical fibers. This is typically, butnot necessarily done after the tiles are bonded to the interveningstructure.

As a detailed example, consider a microlens array containing 1200lenslets arranged in 30 rows of 40 lenslets each. Except that somewhatlarger and fewer lenslets are shown FIG. 5A is illustrative of theexample microlens array 100. Only a single lenslet 110 is labeled toreduce clutter in the figure. The lenslets 110 in this example arearranged with a 1-mm pitch, meaning that the lenslet centers areseparated by 1 mm in each row and each column. Each lenslet 110 isapproximately 0.95 mm in diameter, so they are separated from theirnearest neighbors by approximately 0.1 mm. A 2.5-mm border 140 extendsaround the edges of the microlens array 100 in this example.

The spatial variation of the microlens array focus distance isdetermined. Four tiles, each with a refractive index of approximately1.5 are to be used. Each tile has a rectangular planform with nominaldimensions of 15 mm by 20 mm. Three different tile thicknesses are to beused 0.129 mm, 0.258 mm, and 0.516 mm. These will produce focus-positioncorrections of 0.043 mm, 0.086 mm, and 0.172 mm, respectively. In thiscase the reference thickness is chosen as 0.516 mm; hence only threespacer blocks are required, two having a thickness of 0.258 mm and onehaving a thickness of 0.387 mm. Because one of the tiles has a thicknessequal to the reference thickness, the corresponding spacer-blockthickness is zero; therefore no corresponding spacer block is used.Although the thicknesses are defined to three significant figures,deviations in the thicknesses of as much as +/−0.01 mm have beendetermined to be acceptable in this example.

Although the tiles are nominally 15 mm by 20 mm, to adequately supportthem in a tile tray requires that they be somewhat smaller. In thisexample, the tiles and the spacer blocks are cut to 14.925 mm by 19.925mm with acceptable errors of +/−0.015 mm. Note that this implies thatthe tiles will be separated by a gap. Providing that the collimatedlight beam remains sufficiently far from the edge of the tile, the gapsare not problematical.

FIG. 5B shows a schematic of the tile tray 300. The starting materialfor the tile tray is a piece of Silicon 35 mm by 45 mm by 1.5 mm. Fourrectangular receptacles 320 are micromachined in the Silicon using DRIE.These regions are 14.950 mm by 19.950 mm with a tolerance of +/−0.005mm. The receptacles are 0.450 mm deep. A 2.5-mm border 310 is maintainedaround the edge of the tile tray 300 to conform to the border 140 aroundthe edge of the microlens array 110 (as seen in FIG. 5A).

The three spacer blocks are inserted into their respective receptaclesin the tile tray. Note that each one lies at the bottom of itsreceptacle. The four tiles are placed into their respective receptacles.Three of the tiles overlie spacer blocks; the 0.516 mm thick tile liesat the bottom of its receptacle. FIG. 5C shows the tiles 200 in the tiletray 300.

In this example, UV curing cement (for example, Norland 61) is placed ontop of the tiles. The substrate of the microlens array is placed on topof the tiles. Under a microscope, using X-Y positioners and a rotationstage to set the correct clocking angle, the tile tray is aligned withthe microlens array to within 0.01 mm.

After alignment, ultraviolet radiation is used to cure the cement. Thetile tray and spacer blocks are then removed. The finished product isschematically shown in FIG. 5D. The tiles 200 overlay the substrate(transparent) of the microlens array 100. The lenslets 110 can be seenthrough the tiles 200.

The above description and drawings are only illustrative of preferredembodiments, and the present invention is not intended to be limitedthereto. Any modification of the present invention that comes within thespirit and scope of the following claims is considered part of thepresent invention.

1. A method of making a focus-position compensator for a microlens arrayhaving a substrate, the method comprising the steps of: determining thespatial variation of focus distance of the microlens array; choosing anumber of tiles, a spatial distribution of tiles, and a tilefocus-position correction Δ_(i) of the i-th tile, such that the focusvariation of the microlens array is reduced to within a desired limit;selecting a tile thickness t_(i) of the i-th tile and a tile refractiveindex n_(i), so as to obtain the chosen tile focus-position correctionΔ_(i), choosing a reference thickness t_(ref), the reference thicknessbeing greater than or equal to the maximum tile thickness; determining aspacer-block thickness si corresponding to the i-th tile such thats_(i)=t_(ref)−t_(i); constructing tiles, the i-th tile having thicknesst_(i); constructing spacer blocks for all s_(i)>0, the i-th spacer blockhaving thickness s_(i); micromachining a tile tray, the tile tray havinga receptacle for receiving each tile, the i-th receptacle beingpositioned to receive the i-th tile; for s_(i)>0, placing the i-thspacer block in the i-th receptacle; placing the i-th tile in the i-threceptacle, wherein for s_(i)>0, i-th tile is disposed on top of thei-th spacer block; placing an intervening structure on top of the tiles;bonding the tiles to the intervening structure; removing the tile trayand the spacer blocks.
 2. The method, according to claim 1, wherein: thebonding is adhesive free bonding.
 3. The method, according to claim 1,wherein: the bonding comprises: placing a curable bonding material ontop of each tile prior to placing the intervening structure on top ofthe tiles; and curing the curable bonding material after placing theintervening structure on top of the tiles.
 4. The method, according toclaim 3, wherein: the intervening structure is a window placed betweenthe microlens array and a plurality of optical fibers; and furthercomprising the step of: aligning the window with the microlens array. 5.The method, according to claim 3, wherein: the intervening structure isa fiber-block window connected to a plurality of optical fibers; andfurther comprising the step of: aligning the tile tray with the opticalfibers prior to curing the curable bonding material.
 6. The method,according to claim 3, wherein: the intervening structure is thesubstrate of the microlens array; and further comprising the step of:aligning the tile tray with the microlens array prior to curing thecurable bonding material.
 7. The method, according to claim 6, whereineach tile is made from glass.
 8. The method, according to claim 6,wherein each tile is made from silica.
 9. The method, according to claim6, wherein the tile tray is rectangular and the receptacles arerectangular and evenly spaced.
 10. The method, according to claim 6,wherein the tile tray is made from Silicon and the micromachining isdone with Deep Reactive Ion Etching (DRIE).
 11. The method, according toclaim 6, wherein the curable bonding material is UV curing cement. 12.The method, according to claim 6, wherein a microscope and X—Ypositioners and a rotation stage are used to align the tile tray and themicrolens array.
 13. The method, according to claim 12, wherein the tiletray and the microlens array are aligned to within 10 μm.